E-Beam Lithography Mount

The E-Beam Lithography Mount comprises:
– 2 ea PELCO SEMClips™ to hold the sample
– a Faraday (ø2.5mm with 100µm hole) cup to measure the beam current
– and a gold on carbon resolution sample (ø3mm) for resolution test
All mounted on a 25mm aluminum pin stub, positioned in such a way as to leave maximum sample space. The height of the gold on carbon test specimen is approximately 0.5mm above the surface of the mount. The Gold on Carbon is similar to #617 with gold particle size range from approx. 5nm to 150nm.