GLD-202AA
PRODUCER: ULVAC
2-stage exhaust system / with backflow prevention function / with gas ballast mechanism / input terminal (without cord)
Features
- The two-stage exhaust system has lower pressure (good vacuum) than the one-stage exhaust system.
- Low noise and low vibration.
- The backflow prevention mechanism prevents oil from flowing back to the vacuum chamber when it is stopped due to a power failure.
- The exhaust speed is stable due to the installation of the forced oil supply mechanism.
- Operation from atmospheric pressure is possible.
- Easy connection by internal components knock pins and maintenance by flange motor.
| Unit | 50Hz | 60Hz | ||
|
Actual pumping speed
|
L/min | 200 | 240 | |
|
Ultimate pressure※1
|
G.V.Closed
|
Pa | 0.67 | |
|
G.V.Open
|
6.7 | |||
|
Motor※2
|
Three phase, 200-240V／380-460V, 550W, 4P | |||
|
Full load current
|
A | 3.0 (200V)、3.1 (220V) 3.3 (230V)、3.6 (240V) 1.8 (380V)、1.9 (400V) 2.0 (415V) |
2.7 (200V)、2.7 (220V) 2.7 (230V)、2.8 (240V) 1.5 (380V)、1.6 (400V) 1.7 (440V)、1.7 (460V) |
|
|
Oil capacity
|
mL | 1,100 | ||
|
Recommended oil
|
SMR-100 | |||
|
Weight
|
kg | 29 | ||
|
Inlet port diameter
|
mm | KF-25 | ||
|
Ambient temperature
|
℃ | 7～40 | ||
|
External dimensions
|
mm | 170(W)×513.5(L)×240(H) | ||
※1：Ultimate pressure is measured by Pirani gauge.
(In the case of measurement by McLeod gauge, the value is lower by an order of magnitude for pumps with an Ultimate pressure of 1.3 Pa or less.)
※2：Power supply plug and Power supply code are not included.
